Semiconductor equipment

V-shaped or U-shaped springs are designed for dynamic applications that require high strength and low load
The open groove of the pan plug is equipped with an elastomer O-ring designed for use in a metal-free environmentH-type spiral wound springs are designed for low pressure or vacuum sealing requirements.

We design and manufacture high-performance seals for semiconductor equipment systems. The material is resistant to various solvents, high pressure and abrasion resistance. In addition, we have a variety of pan-plug seals to choose from, and seals can be designed according to specific application requirements.

Semiconductor equipment sealing solution application

●Sputtering process equipment

●Slicing Wafer Chip

●Etching machine

●High temperature resistant door seal seal

●Vacuum pump

●Potion filling equipment

●Photolithography

●Crystal growth chamber

●Dry plasma etching

●Anti-peeling

●PVD